IRIS2000
- Typical Applications
- MEMS Sealing Inspection
- MEMS Device Inspection
- Overlay/CD Metrology
- Defect Review using
IR Techhnology
- Fully Automatic MEMS Inspection & Metrology using Infrared (IR) illumination
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High IR image quality
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Flexible handling options (backside vacuum, flipping, edge-vacuum) for MEMS specific wafers
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Combined reflected & transmitted light illumination modes for best defect contrast
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SECS/GEM
- For further information please contact us
MT3000
- Typical Applications
- CD
- Overlay
- Film Thickness
- Defect Inspection
- Defect Review
- Fully automated metrology and inspection tool
- VIS, UV
- Simultanious wafer handling 75 - 200mm
- SECS/GEM
- For further information please contact us
MT3000 VIS and IR (1050-1550nm)
- Typical Applications
- device sealing, eutectic and glass
- front/back side alignment
- delamination
- CD
- Film Thickness
- Defect Inspection
- Defect Review
- Fully automated metrology and inspection tool
- VIS, UV, IR
- Simultanious wafer handling 75 - 200mm
- SECS/GEM
- For further information please contact us
MT-100IR
- Typical Applications
- device sealing, eutectic and glass
- front/back side alignment
- delamination
- CD
- Overlay
- Defect Review
- Semi-automatic measurement and inspection tool
- IR Illumination
- For further information please contact us
MT50/100
- Typical Applications
- CD
- Overlay
- Film Thickness
- Semi-automatic measurement tool
- For further information please contact us