The Spector series offers defect inspection of masks with or without pellicle.
Products for Spector
Spector M
Semi AutomaticShow details
Typical Application
Mask defect inspection
Features
Open tool architecture
Manual operator mask loading and unloading
Automatic inspection based on die-to-die comparison
Resolution as of 0,5 μ/pixel
Defect sizes as of 1 μm
Mask sizes up to 14’’
Spector A
Automatic with mask robot and mask carriersShow details
Typical Application
Mask defect inspection
Features
Open tool architecture
Robotor mask loading and unloading
Fully automatic mask inspection
Automatic inspection based on die-to-die comparison
Resolution as of 0,5 μ/pixel
Defect sizes as of 1 μm
Mask sizes up to 14’’
Spector
Automatic and fully enclosed with FFUShow details
Typical Application
Mask defect inspection
Key Features
Fully enclosed tool architecture
Robot handling of masks with up to 2 pod or cassette stations
Automatic inspection based on die-to-die comparison
Resolution of 0,5 μ/pixel
Defect sizes as of 1 μm
Mask sizes up to 14’’