MT5500
- CD > 0,3µm
- contact holes > 0,3µm
- chrome and phase shift
- resist on chrome
- line edge roughness
- substrate size up to 550mm x 550mm
- DUV, 248nm; UV 365nm
- DUV, UV, VIS
- reflected and transmitted light
- substrates
- large area scales
- plastic electronics
- glass scales
- special customized solutions
- For further information please contact us