MueTec 50 | MueTec 100 | MueTec 2010 | MueTec 3000 | MueTec 5500 | |
INM 200 microscope | STANDARD | STANDARD | STANDARD | STANDARD | ENHANCED |
Incident light illumination | OR TRANSIMTTED LIGHT | STANDARD | STANDARD | STANDARD | STANDARD |
Transmitted light illumination | OR INCIDENT LIGHT | OPTION | OPTION | OPTION | STANDARD |
UV @ 365nm illumination | - | OPTION | OPTION | OPTION | OPTION |
DUV @ 248nm illumination | - | OPTION | OPTION | OPTION | OPTION |
Infrared (1050nm - 1550nm) | OPTION | OPTION | OPTION | OPTION | OPTION |
Laser autofocus | OPTION | OPTION | STANDARD | STANDARD | STANDARD |
Image autofocus | STANDARD | STANDARD | STANDARD | STANDARD | STANDARD |
6-folded nosepiece | STANDARD | STANDARD | STANDARD | STANDARD | STANDARD |
Motorized Z-drive | STANDARD | STANDARD | STANDARD | STANDARD | STANDARD |
Rotatable camera | OPTION | OPTION | STANDARD | STANDARD | STANDARD |
Positioning stage | OPTION | OPTION | STANDARD | STANDARD | STANDARD |
Customized sample holder | OPTION | OPTION | OPTION | OPTION | OPTION |
CD software | STANDARD | STANDARD | STANDARD | STANDARD | STANDARD |
Overlay software | OPTION | OPTION | OPTION | STANDARD | OPTION |
Defect inspection software | OPTION | OPTION | OPTION | OPTION | OPTION |
Defect review software | OPTION | OPTION | OPTION | OPTION | OPTION |
SECS / GEM software | OPTION | OPTION | OPTION | OPTION | OPTION |
KLARF, TSK interfaces | OPTION | OPTION | OPTION | OPTION | OPTION |
Maintenance software | STANDARD | STANDARD | STANDARD | STANDARD | STANDARD |
Customized software | OPTION | OPTION | OPTION | OPTION | OPTION |
Light tower | OPTION | OPTION | STANDARD | STANDARD | STANDARD |
Antivibration base frame | OPTION | OPTION | STANDARD | STANDARD | STANDARD |
Rack (PC, media controler) | STANDARD | OPTION | STANDARD | STANDARD | STANDARD |
Barcode reader | - | - | - | OPTION | OPTION |
Robot | - | - | - | STANDARD | OPTION |
Film thickness device | OPTION | OPTION | OPTION | OPTION | OPTION |
3-D surface measurement | OPTION | OPTION | OPTION | OPTION | OPTION |