Leading products in optical metrology Made in Germany

Mask Solutions

MT270DUV (LWM270DUV)

  • CD > 0,3µm
  • contact holes > 0,3µm
  • chrome and phase shift
  • resist on chrome
  • line edge roughness
  • mask size up to 7 inch (up to 9 inch available on MT2030)
  • DUV, 248nm; UV 365nm
  • For further information please contact us

MT250DUV (LWM250DUV)

  • CD > 0,3µm
  • contact holes > 0,3µm
  • chrome and phase shift
  • resist on chrome
  • line edge roughness
  • mask size up to 7 inch (up to 9 inch available on MT2030)
  • DUV, 248nm
  • For further information please contact us

MT250UV (LWM250UV)

  • CD > 0,5µm
  • contact holes > 0,5µm
  • chrome and phase shift
  • resist on chrome
  • line edge roughness
  • mask size up to 7 inch (up to 9 inch available on MT2030)
  • UV, 365nm
  • For further information please contact us

MT250 (LWM250)

  • CD > 0,7µm
  • contact holes > 0,7µm
  • chrome
  • resist on chrome
  • line edge roughness
  • mask size up to 7 inch (up to 9 inch available on MT2030)
  • VIS
  • For further information please contact us

MT2030

  • CD > 0,3µm
  • contact holes > 0,3µm
  • chrome and phase shift
  • resist on chrome
  • line edge roughness
  • mask size up to 9 inch
  • DUV, UV, VIS
  • For further information please contact us

Contact

MueTec Europe

Headquarter

+49 89 1500 169 0

info@muetec.com

Hans-Bunte-Str. 5
80992 Munich / Germany

 

 

Manufacturing

+49 9938 9191-0

info@muetec.com

Isarauer Str. 77
94527 Aholming / Germany