Leading products in optical metrology Made in Germany

Infrared Solutions

Silicon, GaAs wafers and other substrates become transparent at infrared (IR) wavelengths. High performance IR optics in combination with a high efficiency InGaAs camera provide images with superior resolution and contrast.

Advantages of MueTec solutions

  • The optics are designed and optimized for the IR range from 1050 to 1550nm including IR optimized objective lenses with selectable magnifications from 2.5x, 5x, 10x, 20x, 63x, 100x.
  • The high resolution InGaAs-camera guarantees best image resolution and highest contrast images.
  • The IR optimized illumination path can be switched to incident and/or transmitted light.
  • A combination of IR & visible light inspection is supported.
  • The autofocus can be chosen between real-time laser autofocus or the highly intelligent fast image autofocus
  • The best-in-class technology ensures worldwide leading edge performance regarding accuracy, repeatability and throughput.

Sealing Inspection For MEMS

With the illumination source adjusted to your application requirements (1050nm - 1550nm),  IRIS2100/IRIS2300 automatically detects smallest details such as bubbles and breaches that effect the functionality of the device. This advanced technology, in combination with our IR optimized software solution also detects delamination and eutectic bonding failures.
 

IR Image showing Hermeticity Fail

Device Defect Inspection

IRIS2100/IRIS2300 enables you to detect and classify contamination and damages in the active device area. Our patented combination of visible and infrared illumination allows you to distinguish surface defects from defects deep inside the substrate.

CD & Overlay Measurement

The combination of a high resolution objective lens (up to 100x) and our powerful NanoStar software solution guarantees the best available measurement accuracy with sub-micron repeatability for CD and overlay measurements. Our systems feature a unique combination of visible and infrared illumination in order to deliver optimized results for structures on the top, and the bottom, and inside the substrate.

Products for Defect Inspection

muetec-IRIS-2100.jpg

IRIS2100
200mm MEMS inspection and metrology system (open cassette)

Typical Applications

MEMS Sealing Inspection
MEMS Device Inspection
Overlay/CD Metrology
Defect Review


Features

Best IR image quality

Flexible handling (backside vacuum, flipping, edge-vacuum) for MEMS specific wafers

Combined reflected & transmitted light illumination modes

SECS/GEM

muetec-IRIS8200.jpg

IRIS8200
200mm MEMS inspection and metrology system (SMIF)

Typical Applications

MEMS Sealing Inspection
MEMS Device Inspection
Overlay/CD Metrology
Defect Review


Features

Best IR image quality

Flexible handling (backside vacuum, flipping, edge-vacuum) for MEMS specific wafers

Combined reflected & transmitted light illumination modes

SECS/GEM

muetec-MT8300.jpg

MT8300
300mm metrology and inspection system (FOUP/SMIF)

Typical Applications

CD
Overlay
Film Thickness
Defect Inspection
Defect Review
300mm and 200mm wafer sizes
SECS/GEM
VIS, UV 


Overlay top-to-bottom

Contact

MueTec Europe

Headquarter

+49 89 1500 169 0

info@muetec.com

Hans-Bunte-Str. 5
80992 Munich / Germany

 

 

Manufacturing

+49 9938 9191-0

info@muetec.com

Isarauer Str. 77
94527 Aholming / Germany