| MueTec 50 | MueTec 100 | MueTec 2010 | MueTec 3000 | MueTec 5500 | |
| INM 200 microscope | STANDARD | STANDARD | STANDARD | STANDARD | ENHANCED |
| Incident light illumination | OR TRANSIMTTED LIGHT | STANDARD | STANDARD | STANDARD | STANDARD |
| Transmitted light illumination | OR INCIDENT LIGHT | OPTION | OPTION | OPTION | STANDARD |
| UV @ 365nm illumination | - | OPTION | OPTION | OPTION | OPTION |
| DUV @ 248nm illumination | - | OPTION | OPTION | OPTION | OPTION |
| Infrared (1050nm - 1550nm) | OPTION | OPTION | OPTION | OPTION | OPTION |
| Laser autofocus | OPTION | OPTION | STANDARD | STANDARD | STANDARD |
| Image autofocus | STANDARD | STANDARD | STANDARD | STANDARD | STANDARD |
| 6-folded nosepiece | STANDARD | STANDARD | STANDARD | STANDARD | STANDARD |
| Motorized Z-drive | STANDARD | STANDARD | STANDARD | STANDARD | STANDARD |
| Rotatable camera | OPTION | OPTION | STANDARD | STANDARD | STANDARD |
| Positioning stage | OPTION | OPTION | STANDARD | STANDARD | STANDARD |
| Customized sample holder | OPTION | OPTION | OPTION | OPTION | OPTION |
| CD software | STANDARD | STANDARD | STANDARD | STANDARD | STANDARD |
| Overlay software | OPTION | OPTION | OPTION | STANDARD | OPTION |
| Defect inspection software | OPTION | OPTION | OPTION | OPTION | OPTION |
| Defect review software | OPTION | OPTION | OPTION | OPTION | OPTION |
| SECS / GEM software | OPTION | OPTION | OPTION | OPTION | OPTION |
| KLARF, TSK interfaces | OPTION | OPTION | OPTION | OPTION | OPTION |
| Maintenance software | STANDARD | STANDARD | STANDARD | STANDARD | STANDARD |
| Customized software | OPTION | OPTION | OPTION | OPTION | OPTION |
| Light tower | OPTION | OPTION | STANDARD | STANDARD | STANDARD |
| Antivibration base frame | OPTION | OPTION | STANDARD | STANDARD | STANDARD |
| Rack (PC, media controler) | STANDARD | OPTION | STANDARD | STANDARD | STANDARD |
| Barcode reader | - | - | - | OPTION | OPTION |
| Robot | - | - | - | STANDARD | OPTION |
| Film thickness device | OPTION | OPTION | OPTION | OPTION | OPTION |
| 3-D surface measurement | OPTION | OPTION | OPTION | OPTION | OPTION |
Leading products in optical metrology 
