Leading products in optical metrology Made in Germany

Defect Review

Enables re-evaluation of defect data from a previous inspection run

Any defect may be repositioned in the center of the field-of-view of the microscope with a single mouse-click, and then examined closer using the flexible binocular tube and a selection of magnifications on the INM-200 microscope in combination with the stored defect images. (online review). Alternatively the review may use stored images only (offline review). Offline review can be performed on the MueTec system or at any office PC.

Any existing defect classification may be adjusted during online or offline review.

 

Products for Defect Inspection

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MT8300
300mm metrology and inspection system (FOUP/SMIF)

Typical Applications

CD
Overlay
Film Thickness
Defect Inspection
Defect Review
300mm and 200mm wafer sizes
SECS/GEM
VIS, UV 

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Spector-A
Fully automated mask metrology and inspection system

Typical Applications

CD
Defect Inspection


Features

Mask sizes up to 8“ by 8“

Robot handling

SECS/GEM

VIS, UV

Also available as semi-automated system with manual mask loading (Spector-M)

 

Contact

MueTec Europe

Headquarter

+49 89 1500 169 0

info@muetec.com

Hans-Bunte-Str. 5
80992 Munich / Germany

 

 

Manufacturing

+49 9938 9191-0

info@muetec.com

Isarauer Str. 77
94527 Aholming / Germany