Leading products in optical metrology Made in Germany

Company History

 

1991

 
Foundation in Munich, Germany
  • Company Objective:
    Development of high precision, leading edge CD (linewidth) Metrology & Inspection Tools
  • Founders:
    Experts in Optics, Software Development and Mechanical Engineering
1992

First customized Tool for CD and Film-Thickness Measurements shipped. MueTec-Software already simulates Windows.

1993

Remarkable success in German market

MueTec
1995

Cooperation agreement for sales and service signed with Leica Microsystems    Leica

1996

High volume purchase order received from the world's largest semiconductor manufacturer
Introduction of a new Mask CD Metrology System: 
the Leica LWM Tool (developed and manufactured by MueTec) becomes the worldwide industry standard within a year

1998

Introduction of I-line@365nm Illumination

MueTec
1999

Opening a new R&D center and production site with clean roomclass100 capability in Aholming, Germany

2000

Introduction of DUV (248nm) illumination that became the standard in mask metrology 2001

2002

Release of the next generation mask metrology tool

MueTec
2003

Introduction of a Water Immersion (WI) mask metrology tool for reticles for the 65nm technology node

2004

First Shipment of the 65nm technology node mask CD tool

2005

Introduction of the first Defect Inspection Tool using MueTec's SDI (Smart Defect Inspection) technology. 
Shipment of the first tool in Europe

2006

Join Development of an Infrared (IR) Detect Inspection Tool with Vistec Semiconductor (today KLA-Tencor IRIS2000).
First installations in Japan.

MueTec
2007

First shipment of the IR Defect Inspection Tool to leading MEMS manufacturer in the US

2010

Incorporation of MueTec Taiwan Ltd.

2011

MueTec announces the 250th tool installed worldwide

2013

Introduction of „Spector-A“, a fully automated mask inspection tool

2014

Investor and management buy-out for continued company growth

2015

Market launch of a new line of macro defect inspection tools for recipe-less operation at 200 wafer per hour

 
MueTec

Contact

MueTec Europe

Headquarter

+49 89 1500 169 0

info@muetec.com

Hans-Bunte-Str. 5
80992 Munich / Germany

 

 

Manufacturing

+49 9938 9191-0

info@muetec.com

Isarauer Str. 77
94527 Aholming / Germany